The Development of 61 Element Discrete Piezoelectric Deformable Mirror

The 61 element discrete piezoelectric deformable mirror(DM61) is used to correct wavefront errors.A lot of difficulties are appeared in our development works because the demads of DM61 now are more than that of the mirror,developed before such as element number(61) and deformation (±３μm）.Methods are adopted from theory analysis and technics investigation to make the DM61 be used in the connection of AOS and ATP to enhance the trace accuracy successfully.