Volume 10 Issue 03
Aug.  1998
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Article Navigation >  High Power Laser and Particle Beams  > 1998  >  10(03): 0-

  • Publish Date: 1998-08-15
    Abstract
  • Choice criteria on target material for soft Xray projection lithography source were proposed in this paper. Spectral data of Lilike oxygen ion were given based on this criteria. The characteristics of new plasma target were given compared with conventional metal targets ．
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      沈阳化工大学材料科学与工程学院 沈阳 110142

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