Influences of oxygen partial pressure on the laser induced damage threshold of ZrO2 film

ZrO2 films were prepared by electron beam evaporation method at different oxygen partial pressures. Through the measurement of XRD, surface thermal lensing technique, optical spectra and laser irradiate resistance testing, the microstructure, refractive index, absorption and laser induced damage threshold were measured. The experiment results indicate that the films are multicrystal, and the tetragonal is dominant. With the oxygen partial pressure increasing, the crystalline, refractive index and weak absorption are all decreasing. The laser induced damage threshold (LIDT) increase with the oxygen partial pressure increase at first, and the LIDT reaches the maximum value 26.7 J/cm２ nearby oxygen partial pressure of 9×10－3 Pa, but the LIDT decreases when oxygen partial pressure continu