Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance

A new method of single-shot measurement of normal incidence soft x-ray Mo/Si multilayer mirror’s reflectance is proposed, experiment has been performed using laser-produced plasma x-ray source, flat field grating spectrometer, soft x-ray CCD. Grazing incident mirror was employed to eliminate high-order contribution. Reflectance of Mo/Si multi-layer mirror with a 13.9 nm designed center wavelength is measured in one laser shot.