Preparation of Mo films with theoretical density by lapping

High-quality metal films with theoretical density are important to measurement of equation of state under high temperature and high pressure. Mo films with thickness more than 20 μm, surface roughness(rms) less than 100 nm and thickness uniformity more than 99% have been prepared by lapping in the paper. Influences of process parameters on appearance, thickness uniformity, surface roughness of the films, etc. have been investigated.