Fabrication process of aluminum film and copper film used in EOS experiment by diamond turning technology

Metal films with material theoretical density are important to measurement of equation of state under high pressure. In this paper, an aluminum film and a copper film used in EOS(equation of state) experiment are produced by diamond turning technology. Process parameters of finish machining are given, including the feed rate 0.001 mm/r, the spindle rotate speed 3 000 r/min, and the depth of cutting 1 μm. Then the surface roughness is characterized by a Form Talysurf series 2 device. The results indicate that the thickness of both aluminum film and copper film are less than 10 μm, the surface root mean square roughness less than 5 nm, the primary maximum peak to valley height less than 50 nm and the thickness uniformity more than 99%.