Eigen mode of micromachined membrane deformable mirror

The construction process and characteristics of the deformable mirror eigen mode are presented. The eigen modes of 37-channel micro-machined membrane deformable mirror from OKO Ltd are listed and fitted with the former 65 order Zernike polynomial. An experiment setup system is established based on micromachined membrane deformable mirror as wavefront corrector, Shack-Hartmann wavefront sensor as wavefront detector and the eigen modes as wavefront control algorithm. The experiment results demonstrate that the eigen modes can both act as basic function which provides the possibility of keeping some modes while compensating other modes and the control algorithm in the adaptive optics system especially in the case of micromachined membrane deformable mirror as wavefront corrector.