Experimental study on heating-induced phase transition of vanadium dioxide thin films irradiated by CW laser

The phase transition principle of VO2 thin films is introduced in this paper. The X-ray diffraction pattern and spectral transmission at different temperature of vanadium dioxide thin films deposited on glass by RF magnetron sputtering were measured. Temperature and transmission change caused by heating-induced phase transition of the vanadium dioxide thin films were measured on real time under the irradiation of a 1.319 μm continuous wave laser beam with an average power density of 283 W/cm2 and a spot diameter of 2 mm. The experimental results indicate that after 480 ms laser irradiation, the temperature of vanadium dioxide thin film is raised from room temperature to about 100 ℃, phase transition occurs and transmittance decreases from 48% before the phase transition to 28% after the