Microstructure and fluorescence property of silicon fabricated by femtosecond laser

The micro-structure surface and fluorescence of silicon slice fabricated by femtosecond laser under the assistant of low consistency sulfuric acid liquor are reported. A 10 mm×10 mm square region was fabricated from 0.5 mm thick and 26 mm in diameter silicon slice. The absorbency is increased due to the change of the surface microstructure of the silicon. Photoluminescence spectra display a high fluorescence emission at the wavelength from 700 nm to 750 nm, thus show a new and simple method to increase the fluorescence property of silicon.