Properties of antireflective coating with vacuum organic contamination resistant property

Silica antireflective coatings with vacuum organic contamination resistant property were prepared by sol-gel method along with ammonia post-treatment. The peak transmittance of such a coating was approximately 100%. Exposing the coating to a vacuum of 10-3 Pa with silicone oil for one week, the transmittance showed little change. However, the peak transmittance of the coating without ammonia post-treatment decreased from 100% to 95.5% under the same condition. The properties of the coatings were analyzed by spectrophotometry, FTIR-spectroscopy, scanning probe microscope method, contact angle measurement, and spectroscopic ellipsometry.