Guided-mode resonance analysis of compressed grating with periodic stack structure

The guided-mode resonance effect of the compressed grating is studied. The characteristic matrix method and the coupled-wave method are used to calculate the eigenvalues of the stack structure and the grating structure. The precondition of this effect in the dielectric compressed grating has been analyzed. The diffractive efficiency near the grating is calculated. To avoid the disadvantage of the guided-mode resonance effect, the grating periods should be 0.667 μm and the depth should be 0.6 μm.