Channel parameter analysis of water-cooled silicon mirror for high-energy laser

The influence of the channel parameters of the water-cooled Si mirror on temperature and thermal deformation was simulated using ANSYS finite element analysis. The results show that the channel parameters have significant effects on the thermal deformation. For a given flow rate of water, the temperature rise and thermal deformation decrease with the decreasing of channel width. With a constant flow rate and channel width, the thermal deformation decreases with the channel depth. However, the effect of channel depth on temperature rise is not obvious. For the water-cooled mirror, it would be better to make the channel small. For high power laser, the channel size of the water-cooled mirror is several hundred mm to 1 mm.