Stability design and analysis of spatial filter system in Shenguang Ⅱ facility

Considering the stability requirement of the spatial filter system in ShenguangⅡ facility, a modal test was carried out to analysis the spatial filter system to check its working performance. The key parameters which control the stability system are indicated according to the theory of vibration. Numerical analysis results show that the natural frequency of SF4 system is 83 Hz, and it satisfies the whole facility stability working performance. The adding carriage in system can increase the rigidity and change the modal. For the support table, the tabletop should be separated and the height should be low to more easily control the distortion of the optical elements on top of the table. As a kind of elastic connection, the bellow in the system can absorb the vibration energy to control the