Improving hydrophobic property of sol-gel antiveflective silica coatings by FAS

Using TEOS as precursor, ammonia as catalyst, silica antireflective coating was prepared by sol-gel process. To obtain hydrophobic properties, the silica coatings were surface-modified with fluoroal kylsilane(FAS) by self-assembly technique. FTIR-spectroscopy, UV-vis spectroscopy, scanning probe microscopy and contact angle measurement were used to measure the properties of the silica coatings. The results show that the peak transmittance of the hydrophobic coating is 99.7%, and the water contact angle of the hydrophobic coating is 110°. The FAS surface modification does not influence the optical properties of the coating, but improve its hydrophobicity remarkably．