Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature

A surface treatment setup of coating TiN film on the inner face of stainless steel pipe vacuum chamber for accelerators at low temperature is described. A series of surface treatment parameters have been achieved through many coating experiments on a stainless steel pipe which is 86 mm in diameter and 2 000 mm in length. The test results show that TiN film of the best quality could be coated on the inner face of stainless steel pipe under 80～90 Pa and 160~180 ℃, and the deposition rate achieves 0.145 nm/s. The secondary electron yield of the coated chamber decreases distinctly compared with that of the uncoated chamber.