Correction performance and control algorithm of micromachined membrane deformable mirror

The correctable aberration modes space of the micromacined membrane deformable mirror(MMDM) is constructed through the singular value decomposition of the mirror’s influence function matrix. Analyzing the correction ability and range of MMDM for a set of orthogonal basis modes, a closed-loop iterative control algorithm for MMDM is introduced. By means of low-rank approximation of the influence function matrix, the algorithm can correct the aberration selectively by filtering out some aberration modes which can not be corrected easily. In experiments, the wavefront from a human eye is used as the incident wavefront of adaptive optics system. The range of the optimal correction mode number is determined by comparing the correction effects for human eye aberration with different numbers of m