High spectral resolution measurement of softXray spectrum using transmission grating spectrometer

High spectral resolution transmission grating spectrometer is established by combining newly manufactured 2 000 l/mm transmission grating with a softＸray CCD. Transmission grating efficiencies have been studied experimentally and theoretically in order to obtain quantitative results of measured Ｘray spectra. Then, a method for unfolding the soft Ｘray spectrum measured with transmission grating spectrometer is introduced, in which the grating efficiencies, CCD quantum efficiencies and grating higher dispersive order overlapping have been taken into account. The developed quantitative measurement method has been applied to obtain Ｘray spectrum from laserentered gold cavity on “ShengguangⅡ” laser facility.