Application of Monte Carlo method to spot size measurement of X-ray sources

In this paper, simulation with the Monte Carlo method is used to study the slot method and the knife-edge method. Results from different experiment layouts are compared. It is suggested that the high penetrability of X-ray has bad effect on the measured value of the spot size of the Ｘ-ray source. In order to reduce this effect, a new experiment layout is designed without impairing the image reception range, the contrast and the measuring precision. Simulation results from the show that more exact measured spot size of the Ｘ-ray source can be obtained with the new experiment layout.