Secondary electron emission characteristic of nano-crystalline diamond films

The preparation,characterization and application of nanocrystalline diamond films have become a new “hot point” in the development of diamond films prepared by chemical vapor deposition. The preparation process of nanocrystalline diamond films with MPCVD method was introduced, as well as the result of surfaces analysis.Then an experiment device is designed to measure the Secondary electron emission coefficient(ＳＥＥＣ) in reflection mode.An expectable aim(ＳＥＥＣ is 15) has been achieved．