Resolution model of Kirkpatrick-Baez microscope with single-layer films

Based on influences of geometric aberration, diffraction, figure error and surface roughness, a root-mean-square spatial resolution model of Kirkpatrick-Baez(KB) microscope with single-layer film is proposed. An 8 keV X-ray imaging experiment by KB microscope with single Ir layer is performed, and the resolution is about 2 mm in central field and better than 5 mm in ±50 mm. The calculated results from the model is in good agreement with the experiment results, and using this model, the spatial resolution related to visual field can be estimated during the systems-design phase.