Quality analysis and control on beam of light in laser measuring probe

A math model of beam quality control has been established and the beam quality evaluation parameter is presented. A duallenses beam quality optimized optical system has been designed for the small measuring probe. It not only keeps beam uniformity but also guarantees the refinement of laser beam, so that the positioning error caused by laser beam can be restrained effectively. Experiments show its feasibility. The beam quality controlled by the optimized system, whose RMS error is only 6.3 mm at its measuring range within positive and negative 5 mm, is superior to those controlled by the focalized and collimated system.