Optical properties of vacuum ultraviolet and deep ultraviolet region substrate materials

To furnish a greater choice of substrate materials for application in vacuum ultraviolet and deep ultraviolet region, the optical properties of several substrate materials such as JGS1, MgF2, CaF2, and LiF are studied in the wavelength region from 120 nm to 300 nm. The optical constants of these materials are determined from photometric measurements through a process of matching calculated and measured values of the reflectance and transmittance in the ultraviolet to deep ultraviolet region. A method to calculate optical properties of weak absorption substrates is introduced.