Numerical simulation and analyses of axial symmetric electron optics focusing characteristics

An electron optics model of axial symmetric cylinder is adopted, three-dimensional and two-dimensional model are established based on this model. The traces of electron beam are calculated, and image location is also obtained. The influences of the electrode shape, size and load on imaging are analyzed. The result indicates that the focusing electrode is more significant than the other electrodes, and load is the most critical parameter in the electron optics system.