DESIGN OF THE CONDENSER FOR SOFT X RAY NORMAL INCIDENCE MICROSOPIC OPTICS

The optimum choice of grazing incidence on the basis of the demands soft X ray normal incidence microscopic optics is presented. The methods determined the elliptical condenser was carried out according to analyzing the geometric parameters of condenser. The structure of the condenser for soft X ray normal incidence microscopic optics was completed considering the reflective performance of materials and the techniques of the condenser.