Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system

An auxiliary optical system has been designed, which can provide precise positioning for aiming Kirkpatrick-Baez(KB) microscope object location. An 8 keV X-ray imaging system by KB microscope with periodic multilayer films has been designed. The field of view and depth of field in the resolution of 5 μm are got, and then the corresponding point and depth of field in diagnostic experiments are calculated. Based on the object-image relations and precision of the KB microscope, an auxiliary visible light imaging system is designed and X-ray imaging experiments are performed, which can achieve equivalent aiming between the visible imaging system and the KB microscope. The results show that ±20 μm vertical axis plane and ±300 μm axial accuracy are achieved through the auxiliary optical pat