Total internal reflection microscopy: a subsurface defects identification technique in optically transparent components

Available test technique for the subsurface defects to be applied in optical process has become an urgent requirement of the manufacture of optics with high resistance to damage. Based on theory of total internal reflection illumination, the research on total internal reflection microscopy(TIRM) technique is done experimentally. It is proved that the TIRM technique for the detection of the subsurface defects is valid, the transformation of the polarization or the incident angle will affect the illumination distribution below the interface, hence the change in visibility of the tiny defects can be used to evaluate the size of the defects in the depth direction. The depth of the subsurface defects can also be gained according to the focusing distance of the microscopy from the interface to t