Fabrication technology of sacrificial layer in LaB6 field emission arrays

This paper analyzes the localization of traditional sacrificial layer material aluminum and brings forward a new sacrificial layer—ZnO-Al complex sacrificial layer. By means of sputtering to prepare aluminum film and evaporating to prepare zinc-oxide film, field emission arrays are fabricated and then tested. The result indicates that ZnO-Al complex sacrificial layer can solve the problem of electrochemistry, the LaB6 field emission array tips with ZnO-Al layer are in good condition and the array maintains field emission characteristics.