Defect testing of large aperture optics based on high resolution CCD camera

A fast testing method on inspecting defects of large aperture optics was introduced. With uniform illumination by LED source at grazing incidence, the image of defects on the surface of and inside the large aperture optics could be enlarged due to scattering. The images of defects were got by high resolution CCD camera and microscope, and the approximate mathematical relation between viewing dimension and real dimension of defects was simulated. Thus the approximate real dimension and location of all defects could be calculated through the high resolution pictures.