Microelectromechanical systems deformable mirror actuator based on electrostatic repulsive force

A novel microelectromechanical systems (MEMS) deformable mirror actuator based on electrostatic repulsive force is presented. The design is based on the principle that asymmetric electric field can generate repulsive force. The actuator can eliminate the pull-in effect which limits the reliability of the conventional electrostatic MEMS deformable mirrors. The actuator consists of five pairs of electrodes, the largest of which is composed of a central mass and a bottom electrode right below it, and the other four of which are positioned on each side of the actuator. The central mass is supported by four L-shaped springs which respectively connecting four anchors on the corners. The resonant frequency and transient response time are simulated by finite element analysis, and they are 4 kHz an