A flatfield XUV spectrograph with 30～50nm flat region

A flat-field spectrograph with a toroidal mirror at 747.4 mm incident distance was designed that can provide 30～50nm flat field and better space resolution. XUV spectrum from a hollow cathode gaseous discharge source filled with He gas was measured using this flatfield spectrograph. The spectrograph system can produce a space-resolved spectral images with spectral resolution of 0.001 around 30nm with 0.1mm the incident slit. The spectrograph system will be used to detect the XUV emission from capillary discharge plasma.