Spectroscopy diagnosis of hydrogen plasma excited by helicon-wave

The hydrogen plasma was excited by using the technology of helicon-wave plasma chemical vapor deposition (HWP-CVD). The characteristics of the plasma were investigated by using the vacuum ultraviolet-visible emission spectroscopy. The influence of experiment parameters on the relative density of the excited hydrogen atoms was analyzed through the analysis of the hydrogen Balmer lines, and that on the vibrational temperature of hydrogen was studied through the analysis of the hydrogen Fulcher band lines. The electron temperature, the electron density and the relative rate coefficient were analyzed. The experimental results indicate that the state of a low pressure hydrogen plasma can be diagnosed by the corona model and the density of the excited hydrogen atoms increases with the increas of