Characteristic analysis of amorphous hydrogenated carbon films prepared by pulsed laser deposition

Amorphous hydrogenated carbon films were prepared by pulsed laser deposition(PLD) and the effect of the hydrogen pressure upon the performance of the films was studied. The AFM and Wyko images of the film show that the surfaces of the films are smooth and compact and that as the hydrogen pressure increases, the roughness becomes higher. The Raman spectra of the films were analyzed and it shows that the G peak and D peak approach to higher wave numbers as the hydrogen pressure increases. Fourier transform infrared spectroscopy indicates that there exist sp3—CH2 and sp2—CHclusters in the film. With floating method of PLD, self-supporting CH films with different thickness (100~300 nm) were synthesized.