Piezoelectric stepper actuator in high power laser facility

According to the requirements of the Shenguang Ⅱ high power laser facility, a novel piezoelectric stepper actuator was designed using piezoelectric stack as actuator element. Utilizing lever mechanism, the moving part is clamped alternatively by clamp mechanism and feed mechanism, and large stroke is created by accumulating the relatively small displacements produced by piezoelectric elements. The characteristics of the system are simple control, large stroke, high resolution and power-off hold. The experiment of the prototype shows that, the actuator has a resolution of 50 nm, travel of 21 mm．