Response function calculation and parameter optimization of piezoelectric film deformable mirror

The response function of square-aperture piezoelectric film deformable mirror is calculated using Fourier series method. Then the optimization of some parameters such as correlation coefficient and beam aperture is done by numerical simulation. The results show that, correlation coefficient is linear with the side-length of electrode and remains above 0.6 for beam aperture of 100 mm×100 mm with 4 to 14 electrodes of 5 to 25 mm side-length in each row, ensuring the mirror’s strong ability to correcting low-order aberrations. Beam aperture ratio is also an important parameter affecting the mirror’s aberration correction ability, and its optimal value is simulated to be 0.8 in our conditions.