Structure design of high accuracy 2×2 array grating

A new type high accuracy 2×2 array diffraction grating structure is proposed, which has good structure stability in design method of modularization and frame structure. Designed micro-nano adjusting unit consists of differential thread and piezoelectricity driver, that realize micro-nano adjustment request of tiled-grating. Design and manufacture questions about essential parts is discussed. Preliminary test of experiment prototype indicates that the coplanar maximum relative error is 17 μm, minimum adjustment precision of micro-nano adjusting unit is possible to achieve 1.8 nm, and the resolution is 0.9 nm. The optical path experiment indicates that tiling adjusting mechanism may fast and real-time adjust 2×2 array diffraction grating to meet requirements, and stable work time is large