Multi-purpose microgripper for ICF targets

A multi-purpose microgripper for ICF targets has been developed based on the characteristic of ICF targets and target-assembly. The microgripper, whose fingers can be changed for different ICF targets, works with flexure hinge and piezoceramics actuator. The flexure hinges of the microgripper are designed and optimized based on the finite element analysis, and the best simulation results are presented. By measuring the strains of the different flexure hinges, the displacement and holding force of the microgripper can be detected independently and they are calibrated precisely. The displacement reaches 1 320 m and its detection resolution is 5 m. The holding force is 365.0 mN and its detection resolution is 1.3 mN.