Experimental study of singlet delta oxygen generator by RF discharge

Experimental of singlet delta oxygen generation by RF discharge under conditions of using pure oxygen and its mixtures with argon were studied. It was discussed in detail the dependence of singlet delta oxygen yield on oxygen flow rate, the ratio of oxygen over argon and gas pressure. The experimental results show that singlet delta oxygen yield decreases with gas pressure increases. The experimental conditions were: the radio frequency was 13.56MHz, the RF power was up to 500W, the oxygen partial pressure was 133.0~399.0Pa, the flow rate of oxygen and argon was 0～1.4mmol/s and 0～2.1mmol/s, respectively. Singlet delta oxygen yield up to 17.5% was achieved．