Optimum design of phasechange cooling mirror's fabrication by finite element method

The effect of the phase-change cooling mirror will depend on the fabrication. Compared to the different computing result through finite element method, the radialized shape is chosen to be the optimum design. For Si mirror, with 80mm in diameter and 12.5mm in depth, the optimum channel fabrication has the depth of 9.9mm and width of 0.4mm and the smallest thermal deformation is 0.37μm after 10s irradiation by a coaxial light whose diameter is 40mm and net absorbing power density is 79-58kW/m2．