Proton beam writing with scanning proton microprobe

Proton beam writing（PBW） is a direct-writing technique that uses a highly focused MeV proton beam to pattern structures of micro- or nano-dimensions in a suitable resist material. The PBW instrumentation was established on the scanning proton microprobe beamline of Key Laboratory of Nuclear Analysis Techniques (Shanghai Institute of Applied Physics, CAS). The study of spin-coating resist layer and developing technology was carried out. A Haibao outline and a double-rectangular micro-structure were fabricated on the positive resist layers; the parallel lines and a crisscross micro-structure were fabricated on the negative resist layers.