DESIGN AND ADJUSTMENT OF A 100 LEVEL KrF EXCIMER LASER
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Shan Yusheng,
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Wang Naiyan,
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Ceng Naigong,
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Zhou Chuangzhi,
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Yang Dawei,
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Ma Weiyi,
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Kang Xiangdong,
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Huang Debao,
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Wang Wenchang,
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Wang Xiaojun,
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Wang Ganchang
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Abstract
A 100-J KrF laser facility is introduced in this paper.The Marx and diode voltages are 1.1MV and 620kV, respectively, with a diode current of 160kA and e- beam energy of 8kJ. The total gas pressure is 0.25MPa (F2 : Kr : Ar = 0.4 : 10 : 89.6). The reflectivities of the laser cavity mirrors are 96% and 25%, respectively.
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