Single-step fabrication of diffraction grating on TiO2 photosensitive gels film by direct UV irradiation

TiO２ photosensitive gel films are derived from chemically modified metalalkoxide with benzoylacetone by sol-gel process. The gel films show an absorption band at around 360 nm, characteristic of the remaining chelate rings. The negative tone gel films are irradiated by UV light through a mask with different pattern to prepare grating pattern on gel films. Depending on the exposure time, the gel films are leaching with ethanol and the grating with different structure on TiO2 photosensitive gel films are obtained．