All solid state pulse excitation source for kHz excimer laser

Due to the constraint of thyratron life, thyratron-based excimer lasers are not available in some situation where high repetition rate is desired, such as in the ophthalmic treatment equipment. We designed a solid state pulsed power module (SSPPM) based on two-stage magnetic pulse compression technology, which uses solid-state switches and magnetic pulse compression to generate a high-voltage pulse of 0.1 microseconds. In discharging on the 193 nm ArF excimer laser, the rise time of the obtained excitation pulse is about 90 ns, the discharge voltage is 16.5 kV, the repetition rate is up to 1 kHz, and the overall transfer efficiency of two-stage magnetic pulse compression switches is 59.1%.