Analysis on compensating capabilities of the low frequency aberrations for active deformable mirror

In this paper , compensating capabilities of the low frequency aberrations for 37 elements active deformable mirror have been analysed by the finite element method and Algor software. The key parameters are confirmed: mirror thickness 8mm, driver span 46mm and pole diameter 12mm. The simulation analysis shows that the low frequency aberrations of 37 elements active mirror can be corrected effectively. The RMS of the aberrations corrected is nogreater than λ／８. This gives the theoretic evidence for producing the active mirror．