Fabrication of UV-curable acrylates/Silica hybrid antireflective film

ren hong-bo; zhang lin; du ai-ming; deng long-jiang

Volume 16 Issue 05

May 2004

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ren hong-bo, zhang lin, du ai-ming, et al. Fabrication of UV-curable acrylates/Silica hybrid antireflective film[J]. High Power Laser and Particle Beams, 2004, 16.

Citation:

ren hong-bo, zhang lin, du ai-ming, et al. Fabrication of UV-curable acrylates/Silica hybrid antireflective film[J]. High Power Laser and Particle Beams, 2004, 16.

ren hong-bo, zhang lin, du ai-ming, et al. Fabrication of UV-curable acrylates/Silica hybrid antireflective film[J]. High Power Laser and Particle Beams, 2004, 16.

Citation:

ren hong-bo, zhang lin, du ai-ming, et al. Fabrication of UV-curable acrylates/Silica hybrid antireflective film[J]. High Power Laser and Particle Beams, 2004, 16.

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Fabrication of UV-curable acrylates/Silica hybrid antireflective film

1.
School of Microelectronics and Solid State Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-987.Mianyang 621900,China

Publish Date: 2004-05-15

Abstract

Abstract

Acrylates/silica hybrid antireflective film was prepared by spin coating and UV curing technological process. The relationship between the mole ratio of acrylates and TEOS γvalue, peak transmission wave-length, reflective index of film were discussed. It is shown that the hybrid film has a wide band of transmission between 425~1 060nm when the γvalue is 2.0, when the transmission is above 98%.
- spin coating,
- uvcurable,
- hybrid antireflective film