Energy loss spectra of Ar^q+(q=0-12) ions in grazing incidence on single-crystal copper surface

By performing a Monte Carlo simulation, energy spectra as a function of surface structure for slow highly charged Ar^q+ ions in grazing incidence on a single-crystal copper surface were studied. Four possible mechanisms were taken into account in energy loss calculation. The energy loss spectrum consisting of two peak structure with an obvious small peak at higher energy loss side was found for Ar atoms grazing along low-index direction. The channeling effect observed in the energy loss of Ar^q+ ions grazing from surface was discussed. The calculated energy loss spectra agree reasonably well with those of experiment.