Abstract: In this paper, an all-solid-state high-frequency and high-voltage pulse generator is designed. The main circuit uses a half-bridge solid-state Marx circuit with IGBTs as main switches. The drive circuit uses a magnetic-isolated synchronous driver with negative voltage bias. Charge and discharge control signals and fault diagnosis and protection operation are processed by an FPGA. The capacitors in different stages can be charged quickly in parallel through low-impedance loops, and meanwhile the slow tailing pulses are truncated to generate square pulses. Besides, the pulse width over 200 μs are achieved due to the hold-on of the gate-emitter capacitors, which can be used to generate high-voltage pulsed electric field. In addition, this pulse generator can also output various numbers of high-frequency pulses with adjustable pulse numbers in burst mode. Experiments show that pulses with the output voltage amplitude of 40 kV, the peak current of 100 A, the repetitive frequency of 30 kHz, the rise time and the fall time less than 100ns are obtained. The burst mode frequency can be up to 200 kHz. The designed pulse generator is able to output high-voltage pulses with continuously adjustable parameters and the generator's size is very small.