Abstract: Various manufacturing defects would be introduced in traditional processing of ultraviolet fused silica components, which need to be eliminated by post-processing technique. Because of the defects, the processing efficiency and surface quality cannot meet the requirements. To solve these problems, the research group proposed controllable compliant techniques including magnetorheological finishing, ion beam figuring, conformal smoothing and hydrodynamic polishing to improve processing effect of fused silica components, and carried out related research. This paper mainly introduces the important progress made by the research group on key technologies, including sub-nanometer precision surface controlled manufacturing technology, nano-precision intrinsic surface property controlled manufacturing method, high-precision and low-defect combination process, equipment of fused silica component. Discussing key technologies and their development status, it provides references for the development of high precision and few defects manufacturing technology of ultraviolet fused silica components in the future.