Abstract: For a long time, the calibration of soft X-ray diagnostic equipment components of ICF research mainly depends on the synchrotron radiation source X-ray metrology station. This kind of device is usually located in a different place from the large laser facility for ICF research, thus it is difficult to meet the real-time field calibration application requirements of ICF’s research soft X-ray components research. In addition, in view of the great difference between the radiation characteristics of synchrotron radiation X-ray and ICF laser plasma X-ray, the calibration results of synchrotron radiation measurement station can not completely measure the response characteristics of components in ICF experiments. In this paper, a kind of monochromatic technology for compact non-harmonic soft X-ray source is introduced. Based on this technology, a monochromatic system of multi energy channel source based on ICF laser plasma X-ray source with homologous, geometric configuration and double beam comparison calibration is developed for on-line calibration of soft X-ray components in ICF applications. The new system is expected to meet the requirements of real-time calibration application of ICF’s soft X-ray components, while the technical characteristics of its calibration beam will be as close as possible to that of the ICF laser plasma X-ray radiation.