Abstract: In response to the lack of standard nanosecond high-voltage pulse power supply, this paper carries out the circuit analysis, structural design and performance testing of high-stability nanosecond high-voltage pulse power supply. By establishing the equivalent circuit model of nanosecond pulse generator, the circuit parameters of 5-stage primary pulse generation and the influence law of one-stage compression steepening gap on the characteristics of nanosecond pulse are obtained by simulation. The nanosecond high-voltage pulse power supply structure design and low jitter corona stabilization switching characteristics are studied to establish a nanosecond pulse power supply system with highly stable output. Development of a nanosecond resistive voltage divider and establishment of a scale factor calibration method based on a combination of nanosecond and microsecond scale transfer calibration tests are made to accurately obtain the scale factor of the nanosecond resistive voltage divider. The pulse power supply output characteristics test results show that the nanosecond pulse power supply system can output exponential nanosecond pulses with a rise time of 2.3 ns±0.5 ns and an amplitude range of 10−60 kV; the relative standard deviation of the output pulse voltage in the full amplitude range is within ±1.5%.