Abstract: This paper proposes compact solid-state Marx generator based on half-bridge structure. In each stage, an NPN MOSFET as the charging switch and a PNP MOSFET as the discharging switch forms a half-bridge circuit, and both their gates and sources are short circuited so that they can be triggered with the same signal. Using many transformers with their primary windings in series, only one half-bridge circuit on the primary side is used to transfer both the driving power and control signals. Then all the charging switches and discharging switches are driven simultaneously, which greatly simplifies the structure and size of solid-state Marx generators and reduces costs. In this way, a 24-stage solid-state Marx generator prototype was built, and high-voltage square pulses of 10 kV, 1 kHz and 5 μs was obtained on a 10 kΩ resistive load. The feasibility of the scheme is verified, and the size of the main circuit is only 20 cm (length)×13 cm (width)×5.5 cm (height).